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Plasma-Material Interactions

This quiz will test your knowledge of Plasma-Material Interactions.

15 Questions Published
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Questions

Question 1 Multiple Choice (Single Answer)

Which of the following is not a type of plasma-material interaction?

  1. Sputtering
  2. Deposition
  3. Etching
  4. Recombination
Question 2 Multiple Choice (Single Answer)

What is the process by which atoms are removed from a solid surface by the impact of energetic particles called?

  1. Sputtering
  2. Deposition
  3. Etching
  4. Erosion
Question 3 Multiple Choice (Single Answer)

What is the process by which material is deposited on a surface from a plasma called?

  1. Sputtering
  2. Deposition
  3. Etching
  4. Erosion
Question 4 Multiple Choice (Single Answer)

What is the process by which material is removed from a surface by a chemical reaction with a plasma called?

  1. Sputtering
  2. Deposition
  3. Etching
  4. Erosion
Question 5 Multiple Choice (Single Answer)

What is the process by which material is removed from a surface by the impact of solid particles called?

  1. Sputtering
  2. Deposition
  3. Etching
  4. Erosion
Question 6 Multiple Choice (Single Answer)

What is the term used to describe the region of a plasma that is in contact with a material surface?

  1. Sheath
  2. Debye length
  3. Plasma boundary
  4. Skin depth
Question 7 Multiple Choice (Single Answer)

What is the thickness of the sheath?

  1. Debye length
  2. Plasma boundary
  3. Skin depth
  4. Mean free path
Question 8 Multiple Choice (Single Answer)

What is the potential drop across the sheath called?

  1. Sheath potential
  2. Debye potential
  3. Plasma potential
  4. Skin depth potential
Question 9 Multiple Choice (Single Answer)

What is the effect of the sheath potential on the plasma?

  1. It accelerates ions towards the surface
  2. It accelerates electrons towards the surface
  3. It reflects ions from the surface
  4. It reflects electrons from the surface
Question 10 Multiple Choice (Single Answer)

What is the effect of the sheath potential on the material surface?

  1. It causes sputtering
  2. It causes deposition
  3. It causes etching
  4. It causes erosion
Question 11 Multiple Choice (Single Answer)

What is the main factor that determines the rate of sputtering?

  1. The ion energy
  2. The ion flux
  3. The material surface temperature
  4. The angle of incidence of the ions
Question 12 Multiple Choice (Single Answer)

What is the main factor that determines the rate of deposition?

  1. The ion energy
  2. The ion flux
  3. The material surface temperature
  4. The angle of incidence of the ions
Question 13 Multiple Choice (Single Answer)

What is the main factor that determines the rate of etching?

  1. The ion energy
  2. The ion flux
  3. The material surface temperature
  4. The angle of incidence of the ions
Question 14 Multiple Choice (Single Answer)

What is the main factor that determines the rate of erosion?

  1. The ion energy
  2. The ion flux
  3. The material surface temperature
  4. The angle of incidence of the ions
Question 15 Multiple Choice (Single Answer)

What are some of the applications of plasma-material interactions?

  1. Thin film deposition
  2. Etching
  3. Sputtering
  4. Surface modification
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