Multiple choice

Which of the following reagents is used in industrial cleaning and etching operations in the semiconductor industry?

  1. Chlorine monofluoride

  2. Chlorine pentafluoride

  3. Chlorine trifluoride

  4. Cobalt(III) fluoride

Reveal answer Fill a bubble to check yourself
C Correct answer
Explanation

Chlorine trifluoride is an interhalogen compound. This colourless, poisonous, corrosive and very reactive gas condenses to a pale-greenish yellow liquid. The compound is primarily of interest as a component in rocket fuels, in industrial cleaning and etching operations in the semiconductor industry, in nuclear reactor fuel processing and other industrial operations.