Multiple choice

Which of the following methods is used for studying the defects in semiconductors?

  1. Transmission electron microscopy

  2. Field ion microscopy

  3. Atom probes

  4. Deep level transient spectroscopy

Reveal answer Fill a bubble to check yourself
D Correct answer
Explanation

Deep Level Transient Spectroscopy (DLTS) is an experimental tool for studying electrically active defects in semiconductors. DLTS investigates defects present in a space charge (depletion) region of a simple electronic device. The most commonly used are Schottky diodes or p-n junctions.